Microstructure and dielectric response of (1 1 1)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition

•(1 1 1)-oriented BaTiO3 films were prepared on Pt-coated Si substrate by laser CVD.•BaTiO3 film had a significant (1 1 1) orientation, close to the ideal orientation.•The ɛ′ of 2600 at TC = 395 K was the highest value in the literature for CVD-BaTiO3.

(1 1 1)-oriented barium titanate (BaTiO3) thick films were prepared on Pt-coated Si substrates by laser chemical vapor deposition. The effects of deposition temperature on the orientation, microstructure, and dielectric response of the BaTiO3 films were investigated. BaTiO3 films exhibited a significant (1 1 1) orientation at deposition temperatures from 930 to 1010 K. With increasing deposition temperature from 875 to 1010 K, the surface microstructure changed from cauliflower-like to columnar structures with pyramidal caps. The permittivity of a (1 1 1)-oriented tetragonal BaTiO3 film prepared at 980 K was 1890 at room temperature and 2600 at the Curie temperature of the film (395 K).