Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1475001 | Journal of the European Ceramic Society | 2010 | 4 Pages |
Abstract
Ultrathin PZT film was prepared using a chemical solution deposition method from polymeric citrate precursors. The PZT solution was spin-coated on an amorphous silica layer formed on a Si(1 0 0) substrate. The films were thermally treated from the substrate side with a low heating rate (1°/min) up to 700 °C and finally annealed for 10 h. Ultrathin PZT films without microstructural instability were prepared in spite of high temperature and long annealing time. AFM and HRTEM investigations revealed the formation of a well-developed dense microstructure consisting of spherical crystallites (4-7 nm). Low roughness (2.2 nm) of a â¼26 nm thick layer was obtained for a two-layered PZT film. The grazing incidence X-ray diffraction (GIXRD) measurements confirmed the polycrystalline structure of ultrathin PZT films. Also, GIXRD and electron energy dispersive X-ray (EDS) analysis showed that compositional variations were smaller than expected, in spite of the long annealing time.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Katarina VojisavljeviÄ, Goran BrankoviÄ, Tatjana SreÄkoviÄ, Aleksander ReÄnik, Zorica BrankoviÄ,