| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1476425 | Journal of the European Ceramic Society | 2007 | 4 Pages |
Abstract
A high throughput method for synthesis and characterization of ferroelectric thin film libraries prepared by chemical solution deposition was developed. With a throughput of over 100 samples of different composition/day, it is possible to screen vast composition fields in a manageable amount of time. The method was applied to films of the binary KNbO3–NaNbO3 system. Structured Pt/SiO2/Si wafers were used as substrates. Samples of 450 nm thickness with remarkable dielectric properties and pure perovskite phases were obtained by optimizing the composition with respect to the K/Na-ratio, and by identifying the ideal amount of alkali-metal excess added to the precursor solutions.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
C. Schroeter, B. Wessler, L.M. Eng,