Microwave enhanced sintering of tape-cast ferroelectric films

Porous Pb(ZrxTi1−x)O3(PZT) thick films that had been prepared by tape casting were densified by microwave energy. The microwave absorption effect is substantially correlated with the film thickness. In microwave-processed PZT thick films, rapid particle necking causes densification with no grain growth nearly in a short treatment time of 20 min at 820 °C. The same porous PZT thick films are difficult to densify in a conventional process. A 30-μm-thick PZT thick film has a pure perovskite structure. Self-supporting PZT thick films with a crack-free and uniform microstructure formed in a microwave process have larger coercive field than conventionally processed bulk PZT. The polarization, 14 μC/cm2, of PZT thick films in a microwave process exceeds that, 7 μC/cm2, of PZT bulk formed in a conventional process.