Measurements of the surface resistance and conductivity of thin conductive films at frequency about 1Â GHz employing dielectric resonator technique

A dielectric resonator technique has been developed for measurements of conductivity and surface resistance of thin metal films deposited on a dielectric substrate. This technique allows for measurements of films having surface resistances that are smaller than 5 Ω without requiring the need to perform measurements of the substrate thickness. The uncertainty of the surface resistance measurements is about 2-3% for both thin films and bulk materials. The accuracy of the conductivity measurements of the thin films is similar to the accuracy of the measurements of their thickness. Several samples have been measured having thicknesses that range from 66 nm to 50 μm.