| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1476704 | Journal of the European Ceramic Society | 2007 | 5 Pages |
Abstract
The chemically inert materials Au and Pt failed to endure the high annealing temperature. Au became extremely rough and cracks appeared. Massive grain growth and adhesion loss occurred with Pt film. Mo electrode withstood the oxidizing ambient conditions with a sacrificial Si or Al-Ti diffusion barrier. Moderate increase in surface roughness was observed after the annealing due to oxidation. Also, thermally stable AlN, Si3N4, and SiO2 diffusion barriers were able to block oxygen from the Mo electrode.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
T. Riekkinen, J. Molarius, M. Ylilammi,