Reclamation of used SiC grinding powder and its sintering characteristics

A process of recycling used abrasive SiC powder after grinding Si wafer was proposed to raw powder for sintering. The used SiC powder could be successfully converted to composite powders consisting of SiC particle and Si3N4 whisker via a heat treatment in N2 atmosphere, in which iron oxide acted as a catalyst in the vapor-liquid-solid (VLS) formation of Si3N4. With the addition of 3 mass% Al2O3 and 1 mass% Y2O3, the composite powders sintered at 1900 °C for 2 h exhibited a 3-point bending strength of 626 ± 48 MPa and a fracture toughness of 3.9 ± 0.1 MPa m1/2, which were significantly enhanced as compared with those of using recovered powder merely composed of SiC particle. The strength and fracture toughness of the sintered material could be improved by optimization of chemical and heat treatment parameters and controlling the amount of sintering additives and hot pressing conditions.