Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1478954 | Journal of the European Ceramic Society | 2005 | 4 Pages |
Abstract
Nano-structured BaTiO3 (BTO) thin films were electrophoretically deposited from BTO nanoparticle suspensions. The microstructural properties of the nanoparticles and thin films were examined through XRD, HR-TEM, and SEM techniques. BTO nanocrystallites in a pseudo-cubic perovskite phase with an average particle size of about 10Â nm were synthesized by a high-concentration sol-gel process. By dispersing a piece of BTO bulk gel into a mixed solvent of 2-methoxyethonal and acetylacetone, the well-dispersed and stable suspensions of BTO nanocrystallites were obtained. From these suspensions, crack-free nano-structured BTO thin films with different thickness from 100Â nm to several micrometers were deposited on Pt/Ti/SiO2/Si substrates by electrophoretic deposition (EPD). The prepared films exhibited a uniform nanostructure, and a smooth surface with a roughness under 10Â nm. The microstructural and dielectric properties of sintered BTO thin films were evaluated.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Y.J. Wu, J. Li, H. Tanaka, M. Kuwabara,