Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1487099 | Materials Research Bulletin | 2016 | 6 Pages |
•Photosensitive siloxanes were used as matrix to make the composite films photo-patternable.•Patterned SOG/SMS composite films on silicon wafer were fabricated by one-step photolithography.•Patterns with different sizes and shapes can be obtained simultaneously by one-step photolithography.•The method is facile and straightforward which may be extended various other luminescence composite films.•Patterned composite films emit blue light.
In this paper, patterned photosensitive silicon-organic hybrid glass material/Sr2MgSi2O7:Eu2+, Dy3+ (SOG/SMS) long persistent luminescence composite films with lines (widths 50 μm and 250 μm), dots (50 μm) and holes (50 μm) patterns on silicon wafer were fabricated by one-step photolithography. SMS particles were first synthesized by sol–gel method and their structure was analyzed by XRD. Patterned SOG/SMS composite films containing 5 wt% of SMS particles were then fabricated by one-step photolithography. SEM, fluorescent microscope and spectrofluorophotometer were used for the characterization of the patterned SOG/SMS composite films. It was found that the obtained patterns are of good shapes and order. The fluorescent emission band of the composite films shows a major peak at 468 nm. Decay curves of the composite films have a similar tendency with that of the pure SMS particles, except for slightly lower intensity for the former.
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