Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1489672 | Materials Research Bulletin | 2012 | 4 Pages |
Abstract
We report on the fabrication and characterization of periodically polarity inverted (PPI) ZnO heterostructures on (0 0 0 1) Al2O3 substrates. For the periodically inverted array of ZnO polarity, CrN and Cr2O3 polarity selection buffer layers are used for the Zn- and O-polar ZnO films, respectively. The change of polarity and period in fabricated ZnO structures is evaluated by diffraction patterns and polarity sensitive piezo-response microscopy. Finally, PPI ZnO structures with subnanometer scale period are demonstrated by using holographic lithography and regrowth techniques.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Jinsub Park, Takafumi Yao,