Article ID Journal Published Year Pages File Type
1495006 Optical Materials 2011 5 Pages PDF
Abstract
► We obtained the complete damage profile of the 3MeV O-implanted waveguide. ► We are used the Ar ion beam etching method to mechanical stripping. ► We studied the damage behaviour of the samples using the RBS/C technique.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Preview
The properties of ion-implanted LiNbO3 waveguides measured by the RBS and ion beam etching stripping methods
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