Article ID Journal Published Year Pages File Type
1495262 Optical Materials 2012 4 Pages PDF
Abstract

We report on the fabrication of single-crystal thin films of Yttrium Aluminum Garnet (YAG, Y3Al5O12) obtained by thermal exfoliation from bulk crystals after deep He-ion implantation. The film qualities and exfoliation process were determined by AFM, optical microscopy, SEM, optical profilometer and nanoindentation. The resulting films were subjected to annealing at ∼1200 °C to relax the residual strain and film curvature that arose from the ion implantation process.

► We demonstrate the exfoliation of high-quality single-crystal thin-films of YAG. ► Implantation dose and thermal exfoliation conditions were determined. ► Post-exfoliation high-temperature annealing process was optimized. ► Mechanical properties of the films were examined by nanoindentation technique.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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