Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1495300 | Optical Materials | 2011 | 7 Pages |
We present extended experimental material about optical and mechanical properties as well as the water content of aluminium oxide films, deposited by plasma ion assisted electron beam evaporation. A clear correlation between these experimental data is established and understood as being affected by the different degree of the porosity of the films. When adding fluorine as a reactive gas during deposition, aluminium oxifluoride layers can be obtained that appear nearly free of water, and combine UV-transparency with higher UV refractive indices than porous aluminium oxide layers.
Graphical abstractPlasma ion assisted deposition of alumina coatings under optimized conditions results in superior UV optical coating properties. A further increase in the UV transparency can be achieved when adding fluorine as reactive gas during deposition.Figure optionsDownload full-size imageDownload high-quality image (81 K)Download as PowerPoint slideHighlights► Alumina and aluminium oxifluoride layers can be prepared by PIAD techniques. ► Thermoprobe measurements quantify the energy impact on the substrate. ► Layer properties can be tuned by the reactive gas flow during deposition. ► Aluminium oxifluoride layers show a better UV transparency than alumina layers.