Synthesis of optical waveguides in SiO2 by silver ion implantation

Optical waveguides have been obtained by silver ion implantation on fused silica substrates. Silver ion implantation profiles were calculated in a SiO2 matrix with different energies of implantation from 125 keV to 10 MeV. Refractive index change (Δn) of the ion implanted waveguides was calculated as a function of their chemical composition. Optical absorption spectra of waveguides obtained by 9 MeV silver ion implantation, at a dose of 5 × 1016 ions/cm2, exhibit the typical absorption band associated to the surface plasmon resonance of silver nanoparticles. Effective refractive indices of the propagation modes and waveguide propagation losses of silver ion implanted waveguides are also presented.

► Optical waveguides were obtained on SiO2 substrates by silver ion implantation. ► The index change Δn of waveguides was calculated from implantation parameters. ► The optical properties were studied through propagation modes and waveguide losses.