Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1496448 | Optical Materials | 2009 | 5 Pages |
Abstract
We report on sub-micrometer thick LiNbO3 films produced by an improved crystal ion slicing and bonding technique using polymer adhesive benzocyclobutene. The latter enables to reproducibly fabricate defect-free films with an area of several cm2. The method supports also integration of tuning electrodes enabling realization of complex electro-optically active photonic devices on a single chip. Furthermore, the structuring techniques to produce high-index-contrast (Δn ≈ 0.65) single-mode optical waveguides are described. The big potential of the novel LiNbO3 thin films for high-density integrated optics applications is shown on an example of electro-optically tunable microring resonator.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Gorazd Poberaj, Manuel Koechlin, Frederik Sulser, Andrea Guarino, Jaroslav Hajfler, Peter Günter,