Development of ion-implanted optical waveguides in optical materials: A review

As one of most efficient techniques for material-property modification, ion implantation has shown its unique ability for alteration of surface refractive index of a large number of optical materials, forming waveguide structures. The induced refractive index changes are materials related, and closely dependent on the species, energies and doses of the implanted ions. This paper reviews the results of recent research on the fabrication, investigation and applications of the ion-implanted optical waveguides in various optical materials, including crystals and non-crystalline glasses. As will be summarized, ion implantation offers a nearly universal solution for the waveguide fabrication in most existing optical materials to date, which opens up new possibilities of attractive optical applications.