Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1496846 | Optical Materials | 2007 | 6 Pages |
Abstract
Theoretical and experimental studies of a double layer antireflection coating deposited onto silicon wafers have been carried out. Magnesium oxide and cerium oxide fabricated by physical vapor deposition method have been applied as low- and high-refractive index materials. MgF2–CeO2–Si structures exhibited the reflectivity below 3% in the wavelength window from 0.5 μm to 1.2 μm. Theoretical simulations of spectral characteristics of the reflectivity of these coatings have been performed. A good correlation between experimental data and theoretical curves has been observed with the assumption that a thin SiO2 layer of a thickness of 16 nm is formed onto Si substrates.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Tadeusz Wiktorczyk, Michał Oleś,