| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1497103 | Optical Materials | 2006 | 5 Pages |
Abstract
Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve zero Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. The PDL mechanism is discussed and explained. Further, the optical propagation losses are improved leading to losses as low as 2 dB/cm.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
G. Pandraud, H.T.M. Pham, P.J. French, P.M. Sarro,