Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1497219 | Optical Materials | 2008 | 7 Pages |
Abstract
We use the fast marching algorithm to simulate the process of the lithographic development (chemical etching) taking a major part in the procedure of the holographic lithography fabrication of photonic crystals. We also develop a method for the check of the bi-continuity of the resulting crystals. The technique furthermore allows removing of the disconnected regions. The simulation turns out to be particularly important for the newly used chalcogenide glasses. The comparison between the simulation and the experiment shows an excellent agreement.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Shlomo Y. Goldin, Avraham Cashingad, Asher Perez, Raphi Dror, Bruno Sfez,