Structural and optical properties of Cu nanoparticles embedded in Si3N4/Si by ion implantation

Cu nanoparticles (NPs) have been fabricated in Si3N4/Si by 45 keV Cu ion implantation at a dose of 1 × 1017 cm−2, and followed by thermal processing at 500-700 °C in air. Techniques, such as atomic force microscopy and X-ray diffraction are used to confirm the formation and evolutions of Cu NPs. The surface plasmon resonance of Cu NPs has been investigated by reflection spectroscopy. The orange-red luminescence band (600 nm) with high fluorescence quantum efficiency has been observed in Cu NPs, and its possible mechanism has also been discussed.