Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1498181 | Scripta Materialia | 2015 | 4 Pages |
Abstract
We investigated the mechanical response of physical vapor deposited Cu–TiN nanolayered composites of varying layer thicknesses from 5 nm to 200 nm. Both the Cu and TiN layers were found to consist of single phase nanometer sized grains. The grain sizes in the Cu and TiN layers, measured using transmission electron microscopy and X-ray diffraction, were found to be comparable to or smaller than their respective layer thicknesses. Indentation hardness testing revealed that the hardness of such nanolayered composites exhibits a weak dependence on the layer thickness but is more correlated to their grain size.
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Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
S. Pathak, N. Li, X. Maeder, R.G. Hoagland, J.K. Baldwin, J. Michler, A. Misra, J. Wang, N.A. Mara,