Article ID Journal Published Year Pages File Type
1498839 Scripta Materialia 2013 4 Pages PDF
Abstract

The minority carrier lifetime (MCL)/flow pattern defect of B and Ge co-doped Czochralski silicon (CZ-Si) was increased/decreased with the initial Ge concentration up to 3 × 1020 cm−3 and decreased/increased at higher Ge concentrations. Secco etch pit defects were increased in heavily (⩾3 × 1020 cm−3) Ge co-doped CZ-Si (grown at low growth rate), which resulted in a low MCL. The influence of Ge on microdefect variation was relatively lower than the crystal growth rate in heavily Ge co-doped CZ-Si.

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Physical Sciences and Engineering Materials Science Ceramics and Composites
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