Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1498839 | Scripta Materialia | 2013 | 4 Pages |
Abstract
The minority carrier lifetime (MCL)/flow pattern defect of B and Ge co-doped Czochralski silicon (CZ-Si) was increased/decreased with the initial Ge concentration up to 3 × 1020 cm−3 and decreased/increased at higher Ge concentrations. Secco etch pit defects were increased in heavily (⩾3 × 1020 cm−3) Ge co-doped CZ-Si (grown at low growth rate), which resulted in a low MCL. The influence of Ge on microdefect variation was relatively lower than the crystal growth rate in heavily Ge co-doped CZ-Si.
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Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Mukannan Arivanandhan, Raira Gotoh, Kozo Fujiwara, Satoshi Uda, Yasuhiro Hayakawa, Makoto Konagai,