Fabrication and size prediction of crystalline nanoparticles of silicon induced by nanogrinding with ultrafine diamond grits

Crystalline nanoparticles of silicon (Si) were achieved by face nanogrinding with ultrafine diamond grits in deionized water at room temperature. Si nanoparticles with an average size of 19.1 nm were observed and confirmed. The average ratio between width and thickness for the nanoparticles formed was 1.32. A size prediction model for Si nanoparticles was proposed based on the fundamental mechanism of face grinding, as well as undeformed chip thickness. The sizes of nanoparticles determined by calculation and experimentally were consistent.