| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1499661 | Scripta Materialia | 2012 | 4 Pages |
Abstract
Electrodeposited LIGA Ni microtensile specimens, representative of microelectromechanical systems components, have been vapor-phase aluminized with a process traditionally used to make diffusion aluminide coatings. Subsequent heat treatments resulted in homogenization of Al throughout the specimens and production of a precipitation-strengthened (γ-Ni + γ′-Ni3Al) microstructure. The thermal stability and strength of these components represent a significant improvement over traditional LIGA Ni materials. Microprobe analysis points to the importance of composition in determining strength and ductility of these materials.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Devin E. Burns, Yong Zhang, Michael Teutsch, Klaus Bade, Jarir Aktaa, Kevin J. Hemker,