Article ID Journal Published Year Pages File Type
1499744 Scripta Materialia 2011 4 Pages PDF
Abstract

Sapphire substrates showed nanosized surface pits after the growth of GaN layers using a two-step process by hydride vapor-phase epitaxy. Threading dislocations with Burgers vectors of c and c + a were found to originate from the pits. Cross-sectional transmission electron microscopy observations are used to elucidate the mechanism of dislocation generation.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
Authors
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