Dislocation density measurement by electron channeling contrast imaging in a scanning electron microscope

We have measured the average dislocation density by electron channeling contrast imaging (ECCI) in a scanning electron microscope under controlled diffraction conditions in a Fe–3 wt.% Si alloy tensile deformed to a macroscopic stress of 500 MPa. Under optimal diffraction conditions, ECCI provides an average dislocation density close to that obtained by bright-field transmission electron microscopy. This result confirms that ECCI is a powerful technique for determining dislocation densities in deformed bulk metals.