Homogeneous Al2O3 multilayer structures with reinforced mechanical stability for high-performance and high-throughput thin-film encapsulation

Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive sputtering of Al2O3. Homogeneous multilayer structures were seen to possess superior mechanical stability than single-layered films. The multilayer films presented 50% improved barrier performance and the fabrication process was 40% faster compared with single Al2O3 layers of the same thickness. The water vapor transmission rate was enhanced up to the order of 10−4 g m−2 day−1 from a three-pair system of reactive and nonreactive sputtered Al2O3 bilayers.