Article ID Journal Published Year Pages File Type
1501761 Scripta Materialia 2007 4 Pages PDF
Abstract

To fabricate high-resolution magnetic tips by a more convenient method, this study applied focused ion beam milling and magnetic film coating techniques to manufacture high aspect ratio (HAR) magnetic force microscope (MFM) tips. The results showed that a HAR MFM tip with a ratio of 10:1 was successfully fabricated. MFM measurements demonstrated that this probe provided clear high-resolution MFM images. The ultimate lateral resolution of the HAR MFM tip was reduced to a minimum of 20 nm.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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