Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1501761 | Scripta Materialia | 2007 | 4 Pages |
Abstract
To fabricate high-resolution magnetic tips by a more convenient method, this study applied focused ion beam milling and magnetic film coating techniques to manufacture high aspect ratio (HAR) magnetic force microscope (MFM) tips. The results showed that a HAR MFM tip with a ratio of 10:1 was successfully fabricated. MFM measurements demonstrated that this probe provided clear high-resolution MFM images. The ultimate lateral resolution of the HAR MFM tip was reduced to a minimum of 20 nm.
Related Topics
Physical Sciences and Engineering
Materials Science
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Authors
H.S. Huang, M.W. Lin, Y.C. Sun, L.J. Lin,