Article ID Journal Published Year Pages File Type
1502019 Scripta Materialia 2007 4 Pages PDF
Abstract

This paper reports the evolutions of stress and mechanical properties of tetrahedral amorphous carbon films upon boron incorporation. A sharp stress relief and slight density reduction combined with moderate hardness and Young’s modulus were observed for the films with boron concentration up to 15% in the cathodes. Raman spectroscopy shows that a clustering of sp2 sites without a notable decrease in sp3 content occurs in the films, which is responsible for the mechanical behavior after boron incorporation.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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