Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1502019 | Scripta Materialia | 2007 | 4 Pages |
Abstract
This paper reports the evolutions of stress and mechanical properties of tetrahedral amorphous carbon films upon boron incorporation. A sharp stress relief and slight density reduction combined with moderate hardness and Young’s modulus were observed for the films with boron concentration up to 15% in the cathodes. Raman spectroscopy shows that a clustering of sp2 sites without a notable decrease in sp3 content occurs in the films, which is responsible for the mechanical behavior after boron incorporation.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Manlin Tan, Jiaqi Zhu, Jiecai Han, Xiao Han, Li Niu, Wangshou Chen,