Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1502152 | Scripta Materialia | 2007 | 4 Pages |
Abstract
AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe2 phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Chien-Chih Chou, Fei-Yi Hung, Truan-Sheng Lui,