| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1502344 | Scripta Materialia | 2008 | 5 Pages |
Abstract
The reliability of MEMS-based sensors for automotive applications critically depends on their high-cycle load-bearing capacity. To investigate the influence of high-frequency cyclic loading on mechanical properties of polycrystalline silicon, a statistically based investigation with the use of novel rotational specimens (90 kHz) has been conduced. Either fatigue fracture (above 3 GPa) or strengthening of the material at cyclic loading below 3 GPa has been observed.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Robert E. Boroch, Roland Müller-Fiedler, Joerg Bagdahn, Peter Gumbsch,