Formation of ultraviolet laser-annealed mesoporous anatase films by a sol–gel process

We report a novel technique for generation of nanocrystalline mesoporous anatase-based titania films by laser annealing through a CeO2 modified sol–gel system. Amorphous titania films deposited on Pt(Si) substrates were subjected to a KrF excimer laser beam (248 nm, 13 ns) for crystallization. Anatase as a dominant phase was achieved at a laser fluence of 30–40 mJ cm−2 while higher fluence favored rutile phase. Raman spectroscopy, field emission gun scanning electron microscopy and atomic force microscopy were used to characterize the crystalline structure and morphology of the CeO2-doped titania films.