Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1502760 | Scripta Materialia | 2008 | 4 Pages |
Abstract
The microstructures and mechanical properties of Ta–W thin films sputter-deposited at two substrate temperatures, 298 and 773 K, were investigated. Whereas the 298 K sample was crystalline, the 773 K sample had an amorphous structure. Hardness and Young’s modulus of the nanocrystalline Ta–W thin film were determined to be 14.29 and 181.73 GPa, respectively. These values are ∼20 and 10% lower than those measured from the amorphous counterpart.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
C.L. Wang, M. Zhang, J.P. Chu, T.G. Nieh,