The effects of annealing temperature on the properties of Bi3.15Nd0.85Ti3O12 thin films

The effects of annealing temperature on microstructure, remnant polarization (2Pr), leakage current and residual stress in Bi3.15Nd0.85Ti3O12 (BNT) thin films prepared by metal-organic decomposition were studied. The best surface features was observed, and the largest 2Pr (63.2 μC cm−2 under 530 kV cm−1) and lowest leakage current (1.32 × 10−5 A cm−2 under 125 kV cm−1) of the film were obtained with annealing at 700 °C. Moreover, the strong residual tensile stress in BNT thin film causes surface fracture and ferroelectric degradation.