Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1503627 | Scripta Materialia | 2006 | 4 Pages |
Abstract
Highly (1 0 0)-oriented Ba(Zr0.2Ti0.8)O3 (BZT) film with nano-sized grains of 30–50 nm is deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition. The dielectric constant and loss tan δ at a frequency of 1 MHz are 792 and 0.020, respectively. The tunability is 69% at 187.5 kV/cm.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
W. Zhang, X.G. Tang, K.H. Wong, H.L.W. Chan,