Article ID Journal Published Year Pages File Type
1503627 Scripta Materialia 2006 4 Pages PDF
Abstract

Highly (1 0 0)-oriented Ba(Zr0.2Ti0.8)O3 (BZT) film with nano-sized grains of 30–50 nm is deposited on Pt/Ti/SiO2/Si substrate by pulsed laser deposition. The dielectric constant and loss tan δ at a frequency of 1 MHz are 792 and 0.020, respectively. The tunability is 69% at 187.5 kV/cm.

Related Topics
Physical Sciences and Engineering Materials Science Ceramics and Composites
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