Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1503693 | Scripta Materialia | 2006 | 6 Pages |
Abstract
Dual beam focused ion beam-scanning electron microscopes are well suited for characterizing micron and sub-micron size microstructural features in three dimensions via serial-sectioning procedures. Importantly, these commercially-available instruments can be used to collect morphological, crystallographic, and chemical information throughout a serial-sectioning experiment. Selected examples are shown to demonstrate these capabilities.
Related Topics
Physical Sciences and Engineering
Materials Science
Ceramics and Composites
Authors
Michael D. Uchic, Michael A. Groeber, Dennis M. Dimiduk, J.P. Simmons,