High Resolution inline Topography of Iron in p-Doped Multicrystalline Bricks by MDP

The iron density is one crucial parameter to verify the quality of the material. Brick measurements enable to check the material quality right at the beginning of the production line. This paper presents contact less high resolution inline topographic measurements of the iron density in multicrystalline silicon bricks by MDP (microwave detected photoconductivity). The measurement procedure is fully automatic and takes less than 5 min a brick. The data obtained were compared to QSSPC (quasi steady state photoconductivity) measurements, however, with a loss in spatial resolution. Furthermore, passivated wafers were prepared from the bricks after the measurements and investigated individually. The consistency of all the data is remarkable.