| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1513150 | Energy Procedia | 2012 | 7 Pages |
Abstract
Ion implantation is a technique that has been demonstrated to improve solar cell efficiency and eliminate process steps in standard and advanced cell designs. Intevac has developed a high productivity, continuous flux ion implantation tool for solar cells. We demonstrate improved n-type emitters over POCl3 diffused emitters, and selective patterning capabilities. Additionally, it is shown that non-mass analyzed implantation provides similar performance as mass-analyzed implantation, yet at a much lower capital cost.
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