| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1515885 | Journal of Physics and Chemistry of Solids | 2013 | 4 Pages |
Abstract
⺠Ruthenium nanostructures were synthesized on Si substrate and HfO2 film using CO2-based supercritical fluid deposition (SCFD). ⺠The size and distribution of ruthenium nanodots were controlled by the weight of Ru precursor and substrate temperature. ⺠Elevated temperature made an enlargement of Ru nanodot diameter. ⺠MIS device embedded Ru nanodots exhibited the hysteresis characteristics with flat band voltage of 0.5 V.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Doyoung Kim, Han-Bo-Ram Lee, Jaehong Yoon, Hyungjun Kim,