Article ID Journal Published Year Pages File Type
1516347 Journal of Physics and Chemistry of Solids 2011 4 Pages PDF
Abstract
► ZnO-TFT with the active layer thickness of 20-100 nm annealed at 950 °C.► 20 nm ZnO film did not effectively form the channel layer.► 40 nm ZnO film exhibited the best performance.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Authors
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