Article ID Journal Published Year Pages File Type
1516725 Journal of Physics and Chemistry of Solids 2011 7 Pages PDF
Abstract
► Strong influence of the expansion plasma regime was found. ► The expansion plasma is not simply related to the overall reactive gas content. ► The chemical pressure induced by the substrate nature influence the optimisation. ► The results allowed us to estimate the average deposition oxygen pressure.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Authors
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