Characterization of the phase structure of proton exchanged channel waveguides in Z cut LiNbO3 using wet etching technique

Article ID	Journal	Published Year	Pages	File Type
1522580	Materials Chemistry and Physics	2013	5 Pages	PDF

Abstract

•Wet etching is a tool for study of proton-exchange layer structure.•Proton-exchange waveguide on Z cut of LiNbO3 consists of three phases.•Ratio of etch rates of these three layers is approximately 4:2:1.

We report the results of a systematic study of the structure of channel waveguides fabricated on Z cut LiNbO3 in benzoic acid melt. It was found that the proton-exchange region consists of three phases of HxLi1−xNbO3 solid solution.

Keywords

Etching Inorganic compounds optical properties Microstructure

Related Topics

Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials

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Characterization of the phase structure of proton exchanged channel waveguides in Z cut LiNbO3 using wet etching technique

Authors

V.I. Kichigin, S.S. Mushinsky, I.V. Petukhov, A.M. Minkin, D.I. Shevtsov, V.A. Oborin, L.N. Malinina, U.O. Salgaeva, A.B. Volyntsev,