| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1523044 | Materials Chemistry and Physics | 2012 | 5 Pages |
Abstract
⺠The thickness of MgO thin film decreases with the increase of incidence angle. ⺠Low-angle deposition can increase film deposition rate and improve its crystallinity. ⺠Multi-arc setting or rotating substrate is necessary for uniform deposition.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
D.Y. Zhu, Y. Liu, C.X. Zheng, M.D. Wang, D.H. Chen, Z.H. He,