Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1523128 | Materials Chemistry and Physics | 2012 | 5 Pages |
Abstract
⺠CNx films were prepared by IBAD with low bombarding energy of assisted N ions. ⺠Growth rate of the CNx film decreased with increasing bombarding energy. ⺠Low bombarding energy could improve the [N]/[C] ratio and sp3/sp2 ratio. ⺠Low bombarding energy evidently influenced film's mechanical properties.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Songbo Wei, Tianmin Shao,