Article ID Journal Published Year Pages File Type
1523128 Materials Chemistry and Physics 2012 5 Pages PDF
Abstract
► CNx films were prepared by IBAD with low bombarding energy of assisted N ions. ► Growth rate of the CNx film decreased with increasing bombarding energy. ► Low bombarding energy could improve the [N]/[C] ratio and sp3/sp2 ratio. ► Low bombarding energy evidently influenced film's mechanical properties.
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Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Preview
Investigation of carbon nitride films deposited by ion beam-assisted deposition with low bombarding energy of N ions
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