Article ID Journal Published Year Pages File Type
1523270 Materials Chemistry and Physics 2012 9 Pages PDF
Abstract
► 200 keV Ar and 166 MeV Xe irradiation effects on AlN/TiN multilayers were compared. ► The multilayered structures remained unmixed due to their immiscibility. ► Contributions of atomic collisions and electronic excitations were distinguished. ► Temperature distribution was evaluated and compared to the induced effects. ► The results can be interesting towards developing radiation tolerant materials.
Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Authors
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