| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1523285 | Materials Chemistry and Physics | 2012 | 5 Pages |
Abstract
⺠A highly sensitive hydrogen gas sensor of the multi-layer, micro heater type was designed and fabricated using a MEMS process. ⺠A Pd thin film was fabricated by R.F. magnetron sputtering. ⺠The electrothermal properties of the designed H2 sensor were analyzed by the finite elements method. ⺠The sensing properties of the hydrogen sensor were optimized at a heater voltage of 4.0 V to give sensitivity of 0.267% to hydrogen gas at 500 ppm. ⺠The gas sensitivity was positively correlated with the hydrogen concentration.
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Authors
Jin-Ho Yoon, Bum-Joon Kim, Jung-Sik Kim,