Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1523664 | Materials Chemistry and Physics | 2012 | 4 Pages |
Abstract
⺠Fluorine ion was implanted into the buffer oxide to form fluorine-silicate-glass (FSG). ⺠Ni-induced lateral crystallization (NILC) was used to fabricate poly-Si TFT on either oxide (NILC-TFT) or FSG (FSG-TFT). ⺠The performance of FSG-TFT was better than that of NILC-TFT.
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Chien-Chih Chen, YewChung Sermon Wu, Chih-Pang Chang,