Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1523668 | Materials Chemistry and Physics | 2012 | 6 Pages |
Abstract
⺠Niobium nitride films were deposited using pulsed laser deposition (PLD) onto Nb substrates with varying laser fluences. ⺠The nitrogen content in NbNx layers is found to be increasing with higher laser fluences up to 15 J cmâ2 and decrease thereafter. ⺠The films exhibit highly textured structure with a preferential orientation of (1 1 0) planes. ⺠The mixed phase in NbNx layers and the ratio of hexagonal phase to cubic phase is dependent on the laser fluence.
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Materials Science
Electronic, Optical and Magnetic Materials
Authors
Ashraf Hassan Farha, Ali Oguz Er, Yuksel Ufuktepe, Hani E. Elsayed-Ali,