| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1523668 | Materials Chemistry and Physics | 2012 | 6 Pages |
Abstract
⺠Niobium nitride films were deposited using pulsed laser deposition (PLD) onto Nb substrates with varying laser fluences. ⺠The nitrogen content in NbNx layers is found to be increasing with higher laser fluences up to 15 J cmâ2 and decrease thereafter. ⺠The films exhibit highly textured structure with a preferential orientation of (1 1 0) planes. ⺠The mixed phase in NbNx layers and the ratio of hexagonal phase to cubic phase is dependent on the laser fluence.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Electronic, Optical and Magnetic Materials
Authors
Ashraf Hassan Farha, Ali Oguz Er, Yuksel Ufuktepe, Hani E. Elsayed-Ali,