Article ID Journal Published Year Pages File Type
1526425 Materials Chemistry and Physics 2008 5 Pages PDF
Abstract

A novel route for the synthesis of a porous, gas-permeable carbon thin film produced from a metal carbide layer was developed. The active carbon layer, known as carbide-derived carbon, was synthesized by chlorination at 350 °C of a TiC thin film deposited onto a macroporous ceramic substrate by a magnetron sputtering technique. The resulting carbon layer was ∼500 nm in thickness with an amorphous carbon structure. Nitrogen permeability values of 67 Barrer are comparable to microporous polymer-derived carbon and advanced ceramic membranes.

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Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
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