Article ID Journal Published Year Pages File Type
1527434 Materials Chemistry and Physics 2007 5 Pages PDF
Abstract

High-quality ferroelectric thick films are required for various piezoelectric applications including high-frequency transducers and microelectromechanical systems. In this work, we report the fabrication of dense crack-free lead zirconate titanate (PZT) thick films on Pt-coated Si substrates using commercial PZT powder dispersed in a sol–gel precursor solution without viscous additives. Preannealed films were infiltrated with the same solution and heat treated at 500 °C. Dielectric and ferroelectric properties of the films are found to be strongly dependent on the number of infiltration steps reaching sufficiently high values: dielectric constant ∼2270 and remanent polarization ∼35 μC cm−2. Moderate coercive field of 60 kV cm−1 and low dielectric loss ∼0.04 are observed in these films. Effective longitudinal piezoelectric coefficient d33 also depends on the number of infiltrations demonstrating remanent value of ∼80 pm V−1 for eight infiltration steps. The results show the suitability of hybrid sol–gel method for the fabrication of PZT thick films for dielectric and piezoelectric applications.

Related Topics
Physical Sciences and Engineering Materials Science Electronic, Optical and Magnetic Materials
Authors
, , , ,